The Heterogeneous Technology Alliance (HTA), a coalition of top European R&D organizations, is offering an SOI-MEMS platform. Looking to bridge the gap between academia and industry, this technological platform pools the SOI-MEMS expertise, capabilities and fabrication facilities of Leti (France), Fraunhofer (Germany), CSEM (Switzerland) and VTT (Finland).
The main focus of HTA (click here for the website) is the further development of innovative Smart Systems. SOI-MEMS is typically used for silicon oscillators, microphones, speakers, compass, navigation, motion sensors, sensors and actuators, energy harvesting, micro fuel cells, microfluidics and other deep reactive-ion etched micro structures. A recently issued brochure gives an overview of the offering.
The HTA is active at all levels of Smart Integrated Systems Solutions: from applied research on materials, processes and equipment through the fabrication of devices and components to the development of new products and services. Development and small-scale production cleanrooms for micro-electronics, MEMS, power electronics and analogue components is available. Wafer handling capacity encompasses wafer sizes ranging from 100, through 150 and 200 to 300 mm.
A one-stop shop for complete system solutions, the HTA guarantees simple access to an enlarged portfolio of technologies and is structured to facilitate technology transfer to European and non-European companies. In addition to working with large industrial partners, the HTA offers services specially suited for small and medium-sized companies. With a combined staff of more than 5,000 scientists and a portfolio of more than 3,000 patents, the HTA is de facto the largest European organization in the field.