The presentations from the SOI Consortium sponsored workshop held during Semicon West are now posted and freely available on the website – click here to see the full agenda with links to the presentations. The workshop, entitled 4G/5G Connectivity: Opportunities for the SOI Supply Chain, was well-attended and generated excellent discussions. If you don’t have […]
By Adele Hars, ASN Editor-in-Chief Speculation is mounting following ST’s April 28th announcement that they’d signed on a new first-tier foundry for 28nm FD-SOI manufacturing. As of this posting, they haven’t yet said which one it is. The social media-sphere is abuzz about the mystery foundry – with posters in LinkedIn groups, Twitter, SemiWiki and […]
SOI (especially fully depleted “FD-SOI”) was a hot topic in the video and audio interviews that Debra Vogler of SST released recently. Here are brief summaries of the most important SOI-related interviews – with top brass from Leti, Soitec, KT, EVG and Qcept – that she made at Semicon West ’11. (If you need a […]
KLA-Tencor says its new WaferSight 2 is the industry’s first enabling wafer suppliers and chipmakers to measure bare wafer flatness, shape, edge roll-off and nanotopography in a single metrology system for 45nm and beyond. SOI wafer-supplier Soitec was a beta site.
New in-line inspection equipment from KT reaches new heights in accuracy for sorting out cleanable particles from killer defects. At the 45nm node, the very nature of the defects and the particularities of the substrate impact light scattering detection methodologies. KLA-Tencor’s new Surfscan SP2XP system not only captures more shallow defects like stains or residues, […]
Historically, chipmakers conducting incoming quality control (IQC) on SOI wafers used for advanced logic devices are challenged in inspecting these substrates as efficiently and effectively as their bulk counterparts. The prevailing inspection process utilizes visible light inspection systems. However, these systems often require specific recipe setups and tool calibrations for each SOI wafer type and […]